-40%
Semitool Paragon ECD Plating System
$ 16632
- Description
- Size Guide
Description
SEMITOOL PARAGON WET PROCESS SYSTEM consisting of:- Model: Paragon
- 2 FOUP WIP
- Set up for 300mm Wafers
- 1 Anneal Chamber
- 1 ULVAC Metrology Unit
- 2 CFD Chambers with In-Situ Rinse
- CFD Tank Includes: RTA Probe, Pump, Heating/Cooling Coils, Bleed Bath Recovery
- 2 Capsule Chambers with Cooling Coils, Heated N2, 1 Sample Port
- 1 Tank Equipped with AMCS Connections
- Bulk Fill Capable for 3 Chemistries
- Facilities Connections on Underside of Tool
- 480VAC, 125A, 50/60Hz
- Sold "As-Is Condition"
- Available for Inspection with Appointment
- Please contact us if you have any questions --- Tel #: 678-321-SEMI / email:
[email protected]
- Asset # 1620063814